Consumables & Precision Parts
High-purity sputtering targets, substrates, evaporation materials, vacuum components, and replacement parts — everything you need to keep your deposition systems running. Worldwide shipping available.
Targets, Substrates, Vacuum Parts & More
High-purity sputtering targets in 50+ compositions, precision-cut silicon wafers and specialty substrates, plus vacuum O-rings, filaments, and replacement parts. Shanghai warehouse stock ships within 5 business days; custom compositions available on request.
Sputtering Targets
High-purity metal, alloy, oxide, and compound targets for magnetron sputtering, ion beam, and evaporation processes
Pure Metal Targets
Al, Ti, Cu, Cr, W, Mo, Ni, Co, Fe, Zr, Ta, Nb — 99.99%–99.999% purity, 1"–8" dia
Alloy Targets
NiCr, TiAl, CoCrMo, FeCo, AlCu and custom binary/ternary compositions, 2"–6" dia
Oxide Targets
ITO, SiO₂, Al₂O₃, TiO₂, ZnO, HfO₂, MgO — ceramic, >95% theoretical density
Nitride & Carbide Targets
TiN, AlN, Si₃N₄, SiC, WC, TiC — hot-pressed, high-density ceramic
Precious Metal Targets
Au, Pt, Ag, Pd, Ru, Ir — 99.99%–99.9999% purity, 0.5"–4" dia, reclaim available
Rotary Targets
Cylindrical rotating format, 50–150 mm dia × 50–300 mm length, all compositions
Bonded Target Assemblies
Indium or braze bonded to Cu/Mo backing plates, ready for system installation
Custom Compositions
Non-standard alloys, doped ceramics, multi-layer targets — contact us for feasibility
Substrates & Wafers
Precision-cut silicon wafers, glass, sapphire, and specialty crystal substrates for thin-film research and device fabrication
Silicon Wafers
P-type / N-type, 2"–12", (100)/(111) orientation, SSP/DSP, 0.3–1.0 mm thick
Quartz Substrates
Fused silica & crystalline quartz, UV-grade, 10×10 mm – 6" wafer, polished
Glass Substrates
Borosilicate (Schott), soda-lime, Corning Eagle XG — 0.5–5 mm, custom cut
Sapphire Wafers
Single-crystal Al₂O₃, C/A/M-axis, 2"–4", epi-ready polish, 200 nm – 5 μm transparent
ITO Coated Glass
10–100 Ω/sq sheet resistance, >85% visible transparency, 3×3" – 6×6" standard
Specialty Crystals
GaAs, InP, SrTiO₃, MgO, CaF₂, LiNbO₃ — 1"–4", semi-insulating or custom doped
Evaporation Materials
Crucibles, boats, wire, and pellets for thermal and e-beam evaporation systems
Evaporation Pellets & Pieces
Au, Ag, Al, Cr, Ti, SiO₂, MgF₂ — 1–6 mm pieces, 99.99%+ purity
Tungsten Boats & Crucibles
W and Mo boats, 5–50 ml capacity, dimpled and flat-bottom, max 2000°C+
Tungsten & Molybdenum Wire
99.95% purity, 0.005"–0.060" dia, coil and filament forms, for thermal sources
E-Beam Crucibles & Liners
Graphite, copper, and ceramic pocket liners, 4cc–40cc, fits standard e-gun hearths
Evaporation Source Parts
Shutter blades, chimney collars, source clips, heater coils — OEM-compatible spares
Vacuum Seals & Fittings
O-rings, flanges, valves, bellows, and feedthroughs for vacuum system assembly and maintenance
O-Ring Kits
Viton (FKM), EPDM, Kalrez (FFKM), copper gaskets — AS568 sizes, assorted kits
KF Quick-Connect Flanges
KF-10 to KF-50, centering rings, clamps, nipples, tees — 304/316 stainless steel
CF Metal-Seal Flanges
CF-16 to CF-200, knife-edge flanges, copper gaskets, UHV rated <10⁻¹² mbar·l/s
Bellows & Flexible Hoses
SS corrugated bellows, 1/2"–4" ID, KF/CF terminations, custom lengths available
Vacuum Feedthroughs
Electrical (multi-pin, coax, HV), rotary motion, fluid — CF and KF mountable
Monitoring & Sensors
Process monitoring crystals, gauges, and flow control components for deposition systems
QCM Crystals & Sensors
5–6 MHz quartz crystals, gold/silver electrode, front-load and screw-in mounts
Vacuum Gauges
Pirani, cold cathode, ion gauge tubes, capacitance manometer sensors — OEM-compatible
RGA Filaments & Parts
Replacement filaments, Faraday cups, and electron multipliers for residual gas analyzers
MFC & Flow Components
Mass flow controller rebuild kits, replacement valves, seals, and calibration gas adapters
Maintenance & Spare Parts
Heaters, shields, pump kits, and service parts to minimize downtime and maintain system performance
Heater Elements
Substrate heaters, lamp arrays, cartridge heaters — custom wattage, 100–1200°C range
Shields & Liners
SS and Al deposition shields, chimney liners, shutter plates — system-specific sizing
Gas Delivery Components
Regulators, gas purifiers, tubing, VCR fittings, manifold blocks — process gas ready
Pump Rebuild Kits
Turbo bearing kits, roughing pump vane kits, oil and filter sets — major brands compatible
System Maintenance Kits
Bundled annual/biennial service packs with seals, gaskets, consumables, and tools
Need custom materials or bulk ordering?
Our supply specialists can source custom compositions, non-standard sizes, and arrange recurring delivery schedules. Contact us for technical specifications and volume pricing.