Consumables & Parts

Consumables & Precision Parts

Keep your instruments performing at their best. High-purity sputtering targets, specialty substrates, vacuum components and spare parts — backed by fast delivery from our Shanghai warehouse. Quick turnaround, consistent quality, competitive pricing.

Sputtering Targets

High-purity metal, ceramic, and alloy targets for magnetron and DC sputtering applications. 99.99% purity standard with rigorous material certification.

Aluminum Targets

High-purity aluminum targets for metallic films and conductive coatings. 99.99% purity standard.

  • 99.99% purity
  • 2" to 4" diameter
  • Planar & rotatable options
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Titanium Targets

Versatile titanium targets for corrosion-resistant films and high-strength coating deposition.

  • 99.99% purity
  • Multiple diameters
  • DC & RF compatible
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ITO Targets

Indium tin oxide targets designed for optical coatings and transparent conductive films.

  • 99.99% purity
  • Custom composition
  • Ceramic bonded
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Silicon Targets

Ultra-high purity silicon targets for precision deposition in semiconductor and optical applications.

  • 99.9999% purity
  • Semiconductor grade
  • Tight composition control
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Gold/Silver Alloys

Precious metal alloy targets designed for optical and decorative coatings.

  • Custom alloy composition
  • Optical coating grade
  • High reflectivity
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Ceramic Targets

Specialty ceramic targets including silicon oxide, aluminum oxide, and titanium dioxide.

  • SiO2, Al2O3, TiO2
  • Custom dimensions
  • Oxide film deposition
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Specialty Substrates

Silicon wafers, borosilicate glass, fused quartz, and engineered substrates for thin-film deposition and optical applications.

Silicon Wafers

Multi-orientation silicon wafers for semiconductor and thin-film deposition research.

  • (100), (110), (111) orientations
  • 2" to 8" diameter
  • Various doping levels
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Glass Slides

High-quality borosilicate and soda-lime glass with custom sizes available.

  • Borosilicate & soda-lime
  • Custom cut sizes
  • Optical grade clarity
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Quartz Wafers

Fused quartz substrates offering high optical transparency and thermal stability.

  • Fused quartz material
  • High optical transparency
  • Excellent thermal stability
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Vacuum Components

Complete vacuum system parts including seals, feedthroughs, gauges, and maintenance kits designed for demanding vacuum environments.

O-Ring Kits

Viton and Kalrez high-performance O-rings in common sizes, available in bulk quantities.

  • Viton & Kalrez materials
  • Common sizes in stock
  • Bulk quantity pricing
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Electrical Feedthroughs

Ceramic and glass-insulated electrical feedthroughs in multi-pin configurations.

  • Multi-pin configurations
  • Ceramic & glass insulated
  • High reliability
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Vacuum Gauges

Pirani and Penning-type vacuum gauges covering ultra-wide pressure ranges.

  • Pirani & Penning types
  • 10⁻⁶ to 10⁻¹¹ Torr
  • High precision measurement
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Pump Maintenance Kits

Pump maintenance kits including filters, specialty oils, and seal elements.

  • Filters, oils, seals
  • Complete maintenance package
  • Extended pump lifetime
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Flanges & Adapters

CF, ISO, KF-type stainless steel flanges and adapter fittings.

  • CF, ISO, KF types
  • Stainless steel construction
  • Multiple size options
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Vacuum Valves

Gate, butterfly, and ball valves with low outgassing design.

  • Gate, butterfly, ball valves
  • Low outgassing
  • Durable & reliable
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Spare Parts

Tungsten filaments, refractory crucibles, heating elements, and system-specific parts to ensure consistent performance and extended instrument life.

Tungsten Filaments

High-purity tungsten filaments for thermal evaporators in multiple gauges.

  • Thermal evaporator grade
  • Multiple gauge options
  • High purity tungsten
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Molybdenum Crucibles

Molybdenum crucibles for e-beam evaporation with refractory liners.

  • E-beam evaporation
  • Refractory lined
  • High-temperature stable
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Shields & Shutters

Sputtering system shields made from tantalum material.

  • Sputtering system grade
  • Tantalum material
  • Corrosion resistant
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In-Stock Items & Quick Order

We maintain stock of commonly ordered items with 5-day dispatch from our Shanghai warehouse

Part No. Description Material Size/Spec Action
ALT-99-3 Aluminum Target 99.99% Al 3" dia, 0.25" thick Get a Quote →
TIT-99-3 Titanium Target 99.99% Ti 3" dia, 0.25" thick Get a Quote →
ITO-99-3 ITO Ceramic Target ITO 90:10 3" dia, 0.375" thick Get a Quote →
Si-WAFER-100 Silicon Wafer (100) P-type Si 4" dia, 0.5mm polished Get a Quote →
OKIT-VIT-AS Viton O-Ring Kit Viton FKM Assorted sizes Get a Quote →
WF-TH-010 Tungsten Filament 99.95% W 0.010" diameter Get a Quote →

Custom Compositions & Fast Delivery Available

We maintain stock of commonly ordered items and can expedite delivery for bulk orders. Contact us for volume pricing and long-term supply agreements — serving labs and production facilities worldwide from Asia.