Thin Film Deposition
From single-source research evaporators to fully automated multi-chamber cluster platforms — 55+ PVD, CVD, ALD, PLD and IBSD systems covering every stage of the thin film workflow.
Complete Thin Film Solutions
From compact research coaters to production-grade cluster platforms, our thin film portfolio spans five core deposition technologies — PVD, thermal/e-beam evaporation, ALD, CVD, and PLD — plus specialty lines for quantum devices, perovskite solar cells, and diamond growth. Every system ships with process recipes and applications support.
Pre-Treatment
Plasma CleaningCore Deposition
PVD · Evaporation · ALD · CVD · PLD · IBSDSpecialty
Quantum · Indium · Perovskite · SCA · MPCVDIntegration
Cluster SystemsPost-Processing
Vacuum Drying
Pre-Treatment
Surface cleaning and activation before deposition — remove organic contaminants, improve film adhesion.
Core Deposition
Thin film growth — choose the deposition method that best matches your material, conformality, and throughput requirements.
Magnetron Sputtering
DC/RF sputtering for metals, alloys, and TCO. 10–100 nm/min.
Evaporation
Thermal & e-beam evaporation for metals and organics. Up to 500 nm/min.
Atomic Layer Deposition
Angstrom-level thickness control with 100% conformality.
CVD
LPCVD, PECVD, ICP-PECVD & MPCVD for graphene, diamond, dielectrics, and battery materials.
Epitaxy
SiC homoepitaxial CVD for 6/8-inch power semiconductor wafers. Production-grade uniformity <0.64%.
Pulsed Laser Deposition
Complex oxides and ferroelectrics with preserved stoichiometry.
Ion Beam Sputtering
Sub-angstrom roughness for precision optics, DUV/EUV coatings. 1–10 nm/min.
Application-Specific Deposition Systems
From superconducting quantum devices to infrared detectors, perovskite solar cells, Li-ion battery anodes, and lab-grown diamond — each system is purpose-built for its target process.
Quantum & Superconducting
Josephson junctions, transmon qubits, and superconducting multilayers — from R&D shadow evaporation to 12-inch fab-scale manufacturing.
Indium Series
High-capacity thermal evaporation for infrared focal-plane array indium bump deposition with precision lift-off.
Perovskite Series
Co-evaporation and sequential deposition for high-efficiency perovskite and tandem solar cells.
MPCVD Diamond Growth System
Microwave plasma CVD for lab-grown diamond — single-crystal and polycrystalline diamond growth.
Ion Coating · Parylene · Arc Melting
Specialty coating and functional layers — ion plating, Parylene conformal coatings, and arc melting vacuum systems.
Multi-Process Integration
Combine multiple deposition and processing steps under continuous vacuum for advanced device stacks.
Post-Processing
Film drying and annealing after wet-process deposition — critical for perovskite and solution-processed films.
Don't know which platform best fits your project?
Our thin film specialists can recommend the ideal deposition technology and system configuration for your application requirements.